Tokyo Electron

Coater/developers, etch, deposition, cleaning

JPpublicest. 1963tel.com (opens tel.com)Checked 11 Oct

The brief

Analyst view
  • Record FY3/2026 sales of ¥2.44T; April-June 2026 sales jumped 33% year on year on AI chip demand.
  • TEL puts its global coater/developer share at 91% (2025); it supplies the track on EUV production lines.
  • A cryogenic etcher for 400+ layer 3D NAND targets the step Lam Research has had to itself.

Technical approach

As reported
Lithography

The track around the scanner

Its coater/developers spin resist onto wafers, bake them and develop the pattern after exposure, docked directly to the scanner.

Process chain

Four steps in a row

It sells tools for deposition, coating/developing, etch and cleaning, the consecutive steps around a lithography exposure.

Etch

Plasma etch, now at subzero

Plasma etchers carve patterns into films; a new cryogenic process speeds the deep, narrow holes 3D NAND needs.

Fab software

AI for tool upkeep

With NVIDIA it is building AI agents and robots for tool maintenance and fab operations, trained in digital twins.

Primer