Canon delivers first FPA-1200NZ2C system to Texas Institute for Electronics

Canon/FPA-1200NZ2C

Canon shipped its first commercially available nanoimprint lithography system to the Texas Institute for Electronics. TIE, founded in 2021 and supported by University of Texas at Austin, will use the system for research, development and prototype production of advanced semiconductors.

• First commercial delivery of NIL semiconductor manufacturing system worldwide.
• System capable of 14nm minimum linewidth (equivalent to 5nm node).
• TIE will conduct R&D and prototype production for advanced semiconductor applications.
• Demonstrates commercialization pathway beyond prototype phase.
• Canon positioned to address semiconductor patterning gap between cost and performance.